Generally, the thickness and uniformity are two major items to identify if the coating result is good or not. The dispensing volume if resist could be fine-tuned by experience and equipment performance, but still 40-70% is lost during the spin-coating. The coating thickness is related to rotating speed, and the uniformity is much close to recipe.

General coater speed at 500 ~ 3000rpm.

 

 

 

EBR ＝ Edge Bead Remover。

 

 

SBD-607 has a common ratio with 70/30, and also could be customized by each requirement.